Methods and materials for modifying the threshold voltage of metal oxide stacks
US11049722B2 · kind B2 · utility
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3References
17Claims
0Family size
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Key dates
| Filing date | Apr 6, 2020 |
| Grant date | Jun 29, 2021 |
| Priority date | — |
| Expiry date | Apr 6, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D64/514
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Methods of modifying the threshold voltage of metal oxide stacks are discussed. These methods utilize materials which provide larger shifts in threshold voltage while also being annealed at lower temperatures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.