Inventor · Menlo Park, CA, US

Atashi Basu

20Patents
2h-index
43Co-inventors
49Inventor score

Filing activity: Mar 17, 2017 → Nov 28, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US10319636B2 Deposition and treatment of films for patterning Electricity 20 Active
US10977405B2 Fill process optimization using feature scale modeling Electricity 3 Active
US10608097B2 Low thickness dependent work-function nMOS integration for metal gate Electricity 2 Active
US10373823B2 Deployment of light energy within specific spectral bands in specific sequences for deposition, treatment and removal of materials Electricity 1 Active
US11515151B2 Methods and precursors for selective deposition of metal films Electricity 1 Active
US11078224B2 Precursors for the atomic layer deposition of transition metals and methods of use Chemistry; Metallurgy 0 Active
US10615041B2 Methods and materials for modifying the threshold voltage of metal oxide stacks Electricity 0 Active
US10510546B2 Schemes for selective deposition for patterning applications Electricity 0 Active
US11887847B2 Methods and precursors for selective deposition of metal films Electricity 0 Active
US10170321B2 Aluminum content control of TiAIN films Electricity 0 Active
US10347495B2 Schemes for selective deposition for patterning applications Electricity 0 Active
US11621160B2 Doped and undoped vanadium oxides for low-k spacer applications Electricity 0 Active
US11836429B2 Determination of recipes for manufacturing semiconductor devices Electricity 0 Active
US11332488B2 Metal precursors with modified diazabutadiene ligands for CVD and ALD and methods of use Chemistry; Metallurgy 0 Active
US10752649B2 Metal precursors with modified diazabutadiene ligands for CVD and ALD and methods of use Chemistry; Metallurgy 0 Active
US11094533B2 Doped and undoped vanadium oxides for low-k spacer applications Electricity 0 Active
US10811250B2 Silicon nitride films with high nitrogen content Electricity 0 Active
US11049722B2 Methods and materials for modifying the threshold voltage of metal oxide stacks Electricity 0 Active
US10475642B2 Doped and undoped vanadium oxides for low-k spacer applications Electricity 0 Active
US10699952B2 Deposition and treatment of films for patterning Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.