Methods for film modification
US11049731B2 · kind B2 · utility
0Cited by
0References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 27, 2019 |
| Grant date | Jun 29, 2021 |
| Priority date | — |
| Expiry date | Sep 27, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/425
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of converting films is disclosed. A method of modifying films is also disclosed. Some methods advantageously convert films from a first elemental composition to a second elemental composition. Some methods advantageously modify film properties without modifying film composition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.