Inventor · Cupertino, CA, US

Erica Chen

21Patents
3h-index
40Co-inventors
55Inventor score

Filing activity: Jan 14, 2015 → Jun 12, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US9777378B2 Advanced process flow for high quality FCVD films Chemistry; Metallurgy 17 Active
US11101174B2 Gap fill deposition process Electricity 14 Active
US10192775B2 Methods for gapfill in high aspect ratio structures Electricity 5 Active
US9620407B2 3D material modification for advanced processing Electricity 3 Active
US10096512B2 Gapfill film modification for advanced CMP and recess flow Electricity 0 Active
US11955333B2 Methods and apparatus for processing a substrate Electricity 0 Active
US11735420B2 Wafer treatment for achieving defect-free self-assembled monolayers Electricity 0 Active
US12384185B2 Methods, systems, and apparatus for inkjet printing self-assembled monoloayer (SAM) structures on substrates Performing Operations; Transporting 0 Active
US10892161B2 Enhanced selective deposition process Electricity 0 Active
US10770292B2 Wafer treatment for achieving defect-free self-assembled monolayers Electricity 0 Active
US11049731B2 Methods for film modification Electricity 0 Active
US10811303B2 Methods for gapfill in high aspect ratio structures Electricity 0 Active
US10964527B2 Residual removal Electricity 0 Active
US11709423B2 Methods of greytone imprint lithography to fabricate optical devices Physics 0 Active
US9773675B2 3D material modification for advanced processing Electricity 0 Active
US9595467B2 Air gap formation in interconnection structure by implantation process Electricity 0 Active
US12111572B2 Methods of greytone imprint lithography to fabricate optical devices Physics 0 Active
US11488856B2 Methods for gapfill in high aspect ratio structures Electricity 0 Active
US12288672B2 Methods and apparatus for carbon compound film deposition Electricity 0 Active
US11682556B2 Methods of improving graphene deposition for processes using microwave surface-wave plasma on dielectric materials Electricity 0 Active
US11289331B2 Methods for graphene formation using microwave surface-wave plasma on dielectric materials Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.