Plasma erosion resistant rare-earth oxide based thin film coatings
US11053581B2 · kind B2 · utility
1Cited by
94References
20Claims
0Family size
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Key dates
| Filing date | Nov 15, 2019 |
| Grant date | Jul 6, 2021 |
| Priority date | — |
| Expiry date | Nov 15, 2039 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/265
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An article comprises a body and at least one protective layer on at least one surface of the body. The at least one protective layer is a thin film having a thickness of less than approximately 20 microns that comprises a ceramic selected from a group consisting of Y3Al5O12, Er2O3, Er3Al5O12, and a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.