Inventor · San Mateo, CA, US

Vahid Firouzdor

44Patents
7h-index
24Co-inventors
65Inventor score

Filing activity: Oct 30, 2009 → Jun 28, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US9583369B2 Ion assisted deposition for rare-earth oxide based coatings on lids and nozzles Emerging Cross-Sectional Technologies 36 Active
US9711334B2 Ion assisted deposition for rare-earth oxide based thin film coatings on process rings Emerging Cross-Sectional Technologies 13 Active
US9725799B2 Ion beam sputtering with ion assisted deposition for coatings on chamber components Emerging Cross-Sectional Technologies 12 Active
US8464926B2 Method of friction stir welding dissimilar metals and workpiece assemblies formed thereby Emerging Cross-Sectional Technologies 11 Active
US9869012B2 Ion assisted deposition for rare-earth oxide based coatings Emerging Cross-Sectional Technologies 8 Active
US9850568B2 Plasma erosion resistant rare-earth oxide based thin film coatings Emerging Cross-Sectional Technologies 8 Active
US10119188B2 Plasma erosion resistant rare-earth oxide based thin film coatings Emerging Cross-Sectional Technologies 7 Active
US9663870B2 High purity metallic top coat for semiconductor manufacturing components Emerging Cross-Sectional Technologies 7 Active
US10745805B2 Plasma resistant coating of porous body by atomic layer deposition Electricity 7 Active
US9937587B2 Process for friction stir welding dissimilar metals and workpiece assemblies formed thereby Emerging Cross-Sectional Technologies 7 Active
US9976211B2 Plasma erosion resistant thin film coating for high temperature application Chemistry; Metallurgy 6 Active
US9879348B2 High purity metallic top coat for semiconductor manufacturing components Emerging Cross-Sectional Technologies 6 Active
US9812341B2 Rare-earth oxide based coatings based on ion assisted deposition Emerging Cross-Sectional Technologies 3 Active
US9687953B2 Chamber components with polished internal apertures Performing Operations; Transporting 3 Active
US10815562B2 Plasma erosion resistant thin film coating for high temperature application Chemistry; Metallurgy 3 Active
US9970095B2 Ion assisted deposition top coat of rare-earth oxide Emerging Cross-Sectional Technologies 3 Active
US9916998B2 Substrate support assembly having a plasma resistant protective layer Emerging Cross-Sectional Technologies 2 Active
US10501843B2 Plasma erosion resistant rare-earth oxide based thin film coatings Emerging Cross-Sectional Technologies 2 Active
US9797037B2 Ion beam sputtering with ion assisted deposition for coatings on chamber components Emerging Cross-Sectional Technologies 2 Active
US10544500B2 Ion assisted deposition top coat of rare-earth oxide Emerging Cross-Sectional Technologies 2 Active
US11053581B2 Plasma erosion resistant rare-earth oxide based thin film coatings Emerging Cross-Sectional Technologies 1 Active
US9420639B2 Smart device fabrication via precision patterning Electricity 1 Active
US10563297B2 Ion assisted deposition top coat of rare-earth oxide Emerging Cross-Sectional Technologies 1 Active
US9869013B2 Ion assisted deposition top coat of rare-earth oxide Emerging Cross-Sectional Technologies 1 Active
US10818481B2 Smart device fabrication via precision patterning Electricity 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.