Support including an electrostatic substrate carrier
US11053582B2 · kind B2 · utility
0Cited by
5References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 19, 2012 |
| Grant date | Jul 6, 2021 |
| Priority date | — |
| Expiry date | May 13, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6833
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention provides a support that comprises: The support also has at least one electrically conductive element 201-202-203 for connecting the bearing plane to the shoulder 211.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.