ION BEAM SERVICES
🏢 View company profile →11Patents
11Active
11Granted
49Portfolio score
Filing activity: Jun 1, 2011 → Sep 6, 2019
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9520274B2 | Ion implanter provided with a plurality of plasma source bodies | Electricity | 1 | Active |
| US9035269B2 | Control module for an ion implanter | Physics | 1 | Active |
| US8895945B2 | Dose measurement device for plasma-immersion ion implantation | Electricity | 1 | Active |
| US9524853B2 | Ion implantation machine presenting increased productivity | Electricity | 1 | Active |
| US9552962B2 | Method of controlling an ion implanter in plasma immersion mode | Electricity | 1 | Active |
| US10263135B2 | Method for producing a solar cell involving doping by ion implantation and depositing an outdiffusion barrier | Emerging Cross-Sectional Technologies | 0 | Active |
| US12266692B2 | Device for improving the mobility of carriers in a MOSFET channel on silicon carbide | Electricity | 0 | Active |
| US10923325B2 | Method of controlling an implanter operating in plasma immersion | Electricity | 0 | Active |
| US11053582B2 | Support including an electrostatic substrate carrier | Electricity | 0 | Active |
| US9922856B2 | Electrostatic heating substrate holder which is polarised at high voltage | Electricity | 0 | Active |
| US9534287B2 | Machine for implanting ions in plasma immersion mode for a low-pressure method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.