Coated flat component in a CVD reactor

US11053586B2 · kind B2 · utility

Assignee

• AIXTRON SE · DE

Inventors

• Marcel KOLLBERG · Würselen, DE
• Daniel Brien · Villach, AT

Key dates

• Filing date: Jun 25, 2015
• Grant date: Jul 6, 2021
• Expiry date: Apr 12, 2037

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C30B25/12
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A CVD reactor includes a flat component with two broad sides extending parallel to each other and spaced apart from each other by a thickness. An outer edge of each broad side transitions without kinks into an edge of an outer peripheral side of the flat component. The thickness of the flat component is substantially less than a diameter of the flat component. The flat component includes a core body composed of graphite. The core body is coated with a SiC or TaC coating, which exhibits a compressive stress at room temperature. In order to reduce the stress between the coating and the core body, the rounding arc length of the outer edge is greater than 90° and the rounding radius of the outer edge is at most 1 mm and/or is greater than the coating thickness. Additionally, rounding segments of the peripheral side transition into each other without kinks.