Daniel Brien
6Patents
1h-index
13Co-inventors
44Inventor score
Filing activity: Dec 18, 2009 → Jan 3, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10658204B2 | Spin chuck with concentrated center and radial heating | Electricity | 2 | Active |
| US10312117B2 | Apparatus and radiant heating plate for processing wafer-shaped articles | Electricity | 1 | Active |
| US8841221B2 | MOCVD reactor having cylindrical gas inlet element | Chemistry; Metallurgy | 1 | Active |
| US11053586B2 | Coated flat component in a CVD reactor | Chemistry; Metallurgy | 0 | Active |
| US12217980B2 | Apparatus for processing a wafer, and method of controlling such an apparatus | Electricity | 0 | Active |
| US10438823B2 | Substrate treatment device | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.