Semiconductor measurement device and method of measuring semiconductor
US11060990B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 27, 2018 |
| Grant date | Jul 13, 2021 |
| Priority date | — |
| Expiry date | Feb 13, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor measurement device includes an electrode provided in a semiconductor sample, and a probe contactable with the semiconductor sample. A driver moves a contact position of the probe with respect to the semiconductor sample. A power supply applies electric power between the probe and the electrode. A measurement operation portion measures a current flowing via the semiconductor sample between the probe and the electrode as a voltage applied between the probe and the electrode is changed, the measurement operation portion measuring the current flowing for each of plural measurement points of a surface of the semiconductor sample while causing the probe to scan the measurement points, or while sequentially bringing the probe into contact with the measurement points. A display displays a relationship between the voltage and the current measured at each of the measurement points.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.