Patent · US Active

Pre-conditioned chamber components

US11072852B2 · kind B2 · utility

0Cited by

4References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Brian T. West · San Jose, US
Lizhong Sun · San Jose, US
William M. Lu · Sunnyvale, US

Key dates

Filing date	Jun 28, 2019
Grant date	Jul 27, 2021
Priority date	—
Expiry date	Jul 28, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3405
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

Embodiments of the disclosure generally relate to a process kit including a shield serving as an anode in a physical deposition chamber. The shield has a cylindrical band, the cylindrical band having a top and a bottom, the cylindrical band sized to encircle a sputtering surface of a sputtering target disposed adjacent the top and a substrate support disposed at the bottom, the cylindrical band having an interior surface. A texture is disposed on the interior surface. The texture has a plurality of features. A film is provided on a portion of the features. The film includes a porosity of about 2% to about 3.5%.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.