William M. Lu
7Patents
2h-index
19Co-inventors
44Inventor score
Filing activity: Apr 23, 2012 → Dec 2, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9001489B2 | Electrostatic chuck AlN dielectric repair | Emerging Cross-Sectional Technologies | 7 | Active |
| US9101954B2 | Geometries and patterns for surface texturing to increase deposition retention | Emerging Cross-Sectional Technologies | 7 | Active |
| US10583465B2 | 30 nm in-line LPC testing and cleaning of semiconductor processing equipment | Physics | 1 | Active |
| US11648639B2 | Polishing jig assembly for a new or refurbished electrostatic chuck | Electricity | 0 | Active |
| US11810766B2 | Protection of aluminum process chamber components | Electricity | 0 | Active |
| US11072852B2 | Pre-conditioned chamber components | Electricity | 0 | Active |
| US11260498B2 | Method of polishing a new or a refurbished electrostatic chuck | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.