Patent · US Active

Precursors for the atomic layer deposition of transition metals and methods of use

US11078224B2 · kind B2 · utility

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2References
6Claims
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Key dates

Filing dateApr 6, 2018
Grant dateAug 3, 2021
Priority date—
Expiry dateJul 5, 2038

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC23C16/45553
  • WIPO fieldOrganic fine chemistry
  • WIPO sectorChemistry

Abstract

Metal coordination complexes comprising at least one diazabutadiene based ligand having a structure represented by:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.