Patent · US Active

Reduction of crystal growth resulting from annealing a conductive material

US11081364B2 · kind B2 · utility

0Cited by
8References
5Claims
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Assignee

Inventors

Key dates

Filing dateFeb 6, 2019
Grant dateAug 3, 2021
Priority date
Expiry dateFeb 6, 2039

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D1/694
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Systems, apparatuses, and methods related to reduction of crystal growth resulting from annealing a conductive material are described. An example apparatus includes a conductive material selected to have an electrical resistance that is reduced as a result of annealing. A stabilizing material may be formed over a surface of the conductive material. The stabilizing material may be selected to have properties that include stabilization of the reduced electrical resistance of the conductive material and reduction of a degree of freedom of crystal growth relative to the surface resulting from recrystallization of the conductive material during the annealing.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.