Protective coating for electrostatic chucks
US11086233B2 · kind B2 · utility
7Cited by
10References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 20, 2018 |
| Grant date | Aug 10, 2021 |
| Priority date | — |
| Expiry date | May 26, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6875
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An ElectroStatic Chuck (ESC) including a chucking surface having at least a portion covered with a coating of silicon oxide (SiO2), silicon nitride (Si3N4) or a combination of both. The coating can be applied in situ a processing chamber of a substrate processing tool and periodically removed and re-applied in situ to create fresh coating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.