Vincent E. Burkhart
36Patents
14h-index
46Co-inventors
81Inventor score
Filing activity: Mar 8, 1996 → Aug 31, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5656093A | Wafer spacing mask for a substrate support chuck and method of fabricating same | Emerging Cross-Sectional Technologies | 778 | Expired |
| US6469283B1 | Method and apparatus for reducing thermal gradients within a substrate support | Electricity | 69 | Expired |
| US5764471A | Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck | Emerging Cross-Sectional Technologies | 64 | Expired |
| US6075375A | Apparatus for wafer detection | Electricity | 48 | Expired |
| USD425919S | Electrostatic chuck with improved spacing mask and workpiece detection device | General | 41 | Expired |
| US6377060B1 | Method and apparatus for wafer detection | Electricity | 36 | Expired |
| US6303879A | Laminated ceramic with multilayer electrodes and method of fabrication | Electricity | 26 | Expired |
| USD420022S | Electrostatic chuck with improved spacing and charge migration reduction mask | General | 25 | Expired |
| US5825607A | Insulated wafer spacing mask for a substrate support chuck and method of fabricating same | Electricity | 23 | Expired |
| US5886865A | Method and apparatus for predicting failure of an eletrostatic chuck | Emerging Cross-Sectional Technologies | 21 | Expired |
| US5923521A | Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck | Emerging Cross-Sectional Technologies | 19 | Expired |
| US9447499B2 | Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery | Chemistry; Metallurgy | 17 | Active |
| US5745332A | Monopolar electrostatic chuck having an electrode in contact with a workpiece | Emerging Cross-Sectional Technologies | 16 | Expired |
| USD407073S | Electrostatic chuck with improved spacing and charge migration reduction mask | General | 15 | Expired |
| US7018515B2 | Selectable dual position magnetron | Electricity | 12 | Expired |
| USD420023S | Electrostatic chuck with improved spacing mask and workpiece detection device | General | 11 | Expired |
| US6488820B1 | Method and apparatus for reducing migration of conductive material on a component | Electricity | 11 | Expired |
| USD406852S | Electrostatic chuck with improved spacing mask and workpiece detection device | General | 10 | Expired |
| US9337067B2 | High temperature electrostatic chuck with radial thermal chokes | Electricity | 10 | Active |
| US7736473B2 | Magnetron having continuously variable radial position | Electricity | 8 | Active |
| US11183368B2 | RF tuning systems including tuning circuits having impedances for setting and adjusting parameters of electrodes in electrostatic chucks | Electricity | 7 | Active |
| US11086233B2 | Protective coating for electrostatic chucks | Electricity | 7 | Active |
| US7138039B2 | Liquid isolation of contact rings | Chemistry; Metallurgy | 5 | Expired |
| US8685215B2 | Mechanism for continuously varying radial position of a magnetron | Electricity | 4 | Active |
| US11835868B2 | Protective coating for electrostatic chucks | Electricity | 3 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.