Support table, support table assembly, processing arrangement, and methods thereof
US11088009B2 · kind B2 · utility
0Cited by
5References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 17, 2019 |
| Grant date | Aug 10, 2021 |
| Priority date | — |
| Expiry date | Jul 17, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2221/68381
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
According to various embodiments, a support table may include: a baseplate including a support structure, the support structure defining a support region over the baseplate to support at least one of a workpiece or a workpiece carrier therein; and one or more light-emitting components disposed between the baseplate and the support region. The one or more light-emitting components are configured to emit light into the support region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.