Optical emission spectroscopy system, method of calibrating the same, and method of fabricating semiconductor device
US11092495B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Mar 5, 2019 |
| Grant date | Aug 17, 2021 |
| Priority date | — |
| Expiry date | Mar 5, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2003/2879
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical emission spectroscopy system may include a reference light source, an analyzer to receive and analyze light transmitted from the reference light source, and a calibrator to calibrate light emitted from the reference light source. The calibrator may change a calibration ratio in accordance with an incidence angle of the light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.