Jeongil Mun
6Patents
1h-index
10Co-inventors
37Inventor score
Filing activity: Mar 5, 2019 → Jul 12, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11264291B2 | Sensor device and etching apparatus having the same | Electricity | 5 | Active |
| US11092495B2 | Optical emission spectroscopy system, method of calibrating the same, and method of fabricating semiconductor device | Physics | 0 | Active |
| US11215506B2 | Substrate processing apparatus, substrate processing module, and semiconductor device fabrication method | Physics | 0 | Active |
| US11862440B2 | Semiconductor processing equipment including electrostatic chuck for plasma processing | Electricity | 0 | Active |
| US10935429B2 | Substrate processing apparatus, substrate processing module, and semiconductor device fabrication method | Physics | 0 | Active |
| US11715628B2 | Method of forming plasma processing apparatus, related apparatus, and method of forming semiconductor device using the same | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.