Reactor, system including the reactor, and methods of manufacturing and using same
US11114283B2 · kind B2 · utility
2Cited by
2,008References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 16, 2018 |
| Grant date | Sep 7, 2021 |
| Priority date | — |
| Expiry date | Aug 14, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3341
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A reactor for processing substrates and methods for manufacturing and using the reactor are disclosed. Specifically, the reactor can include a material that forms gas compounds. The gas compounds are then easily removed from the reactor, thus reducing or avoiding contamination of the substrates in the reactor that would otherwise arise.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.