Manufacturing methods for mandrel pull from spacers for multi-color patterning
US11127594B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 6, 2018 |
| Grant date | Sep 21, 2021 |
| Priority date | — |
| Expiry date | Jun 7, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/32139
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Embodiments are disclosed for processing microelectronic workpieces having patterned structures to improve mandrel pull from spacers for multi-color patterning. The disclosed embodiments form patterned structures on a substrate including mandrels, form spacers adjacent the mandrels that are recessed such that a height of the spacers is less than the height of the mandrels, form protective caps over the spacers while exposing top surfaces of the mandrels, and remove the mandrels to leave a spacer pattern with cap protection. The remaining spacer pattern can then be transferred to underlying layers in additional process steps. The recessing of the spacers and formation of the protective caps tends to reduce or eliminate spacer damage suffered by prior solutions during mandrel pull from spacers for multi-color patterning.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.