Specimen holder and charged particle beam device provided with same
US11133150B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 23, 2016 |
| Grant date | Sep 28, 2021 |
| Priority date | — |
| Expiry date | Apr 13, 2037 |
Classification
- Technology area (CPC —)General
Abstract
The present invention addresses a problem of providing a specimen holder capable of observing phenomena on the surface and in the inner part of a specimen, the phenomena being generated in different gas spaces, and a charged particle beam device provided with the specimen holder. In order to solve this problem, a specimen holder for a charged particle beam device which observes a specimen using a charged particle beam is configured such that the specimen holder includes a first gas injection nozzle capable of injecting a first gas to a first portion of a specimen, a second gas injection nozzle capable of injecting a second gas to a second portion of the specimen, the second portion being different from the first portion, and a partition part provided between the first gas injection nozzle and the second gas injection nozzle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.