Patent · US Active

Particle beam apparatus having an aperture unit and method for setting a beam current in a particle beam apparatus

US11139140B2 · kind B2 · utility

1Cited by

24References

30Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Dirk Preikszas · Oberkochen, DE
Michael Albiez · Aalen, DE

Key dates

Filing date	Jul 22, 2010
Grant date	Oct 5, 2021
Priority date	—
Expiry date	Oct 20, 2032

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/31749
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A particle beam apparatus includes a first aperture unit having an adjustable aperture opening. The particle beam apparatus may include a first condenser lens having a first pole shoe and a second pole shoe. Both the first pole shoe and the second pole shoe may be adjustable relative to a second aperture unit independently of each other. The second aperture unit may be designed as a pressure stage aperture separating a first area having a vacuum at a first pressure, and a second area having a vacuum at a second pressure. Additionally, a method for adjusting a beam current in a particle beam apparatus is provided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.