Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatus
US11143969B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 9, 2018 |
| Grant date | Oct 12, 2021 |
| Priority date | — |
| Expiry date | Apr 17, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70533
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of performance testing working parameters of a fluid handing structure in an immersion lithographic apparatus, the method including: placing a test substrate having an upper surface with a first portion with a resist defining the upper surface and a second portion with a material different from the resist defining the rest of the upper surface on a table in the immersion lithographic apparatus, confining liquid on a region of an upper surface of the table and/or the upper surface of the test substrate by operating the fluid handing structure using the associated working parameters, moving the table such that the region moves from the second portion to the first portion, and detecting change to and/or residue on the first portion as a result of liquid being left behind on the first portion during the moving.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.