Nirupam Banerjee
4Patents
1h-index
37Co-inventors
37Inventor score
Filing activity: Apr 12, 2017 → Dec 22, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10908496B2 | Membrane for EUV lithography | Physics | 1 | Active |
| US11774868B2 | Image sensor for immersion lithography | Physics | 0 | Active |
| US11762281B2 | Membrane for EUV lithography | Physics | 0 | Active |
| US11143969B2 | Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatus | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.