Arrangement for microscopy and for correction of aberrations

US11163147B2 · kind B2 · utility

Assignee

• Carl Zeiss Microscopy GmbH · DE

Inventors

• Jörg Siebenmorgen · Jena, DE
• Helmut Lippert · Jena, DE
• Thomas Kalkbrenner · Jena, DE
• Ingo Kleppe · Jena, DE
• Ralf Wolleschensky · Jena, DE
• Artur Degen · Jena, DE
• Matthias Wald · Jena, DE
• Lars-Christian Wittig · Jena, DE
• Michael Gölles · Jena, DE
• Wolfgang Singer · Aalen, DE

Key dates

• Filing date: Jun 29, 2017
• Grant date: Nov 2, 2021
• Expiry date: Aug 22, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/16
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An arrangement for microscopy, having an illumination optical unit with an illumination objective for illuminating a specimen on a specimen carrier. An optical axis of the illumination objective lies in a plane which includes an illumination angle that differs from zero with the normal of a specimen plane and the illumination is implemented in the plane. A detection optical unit with a detection objective is located in a detection beam path. The optical axis of the detection objective includes a detection angle that differs from zero with the normal of the specimen plane. The illumination objective and/or the detection objective has an illumination correction element. A meniscus lens is located between the specimen carrier and the illumination and detection objectives being arranged both in the illumination beam path and in the detection beam path.