Patent · US Active

Temperature-controlled flange and reactor system including same

US11168395B2 · kind B2 · utility

3Cited by

2,093References

17Claims

0Family size

Assignee

ASM IP Holding B.V. · NL

Inventors

Sonti Sreeram · Gilbert, US
John Tolle · Gilbert, US
Joe Margetis · Gilbert, US
Junwei Su · Tempe, US

Key dates

Filing date	Mar 11, 2020
Grant date	Nov 9, 2021
Priority date	—
Expiry date	Mar 11, 2040

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C16/4411
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A flange, flange assembly, and reactor system including the flange and flange assembly are disclosed. An exemplary flange assembly includes heated and cooled sections to independently control temperatures of sections of the flange. Methods of using the flange, flange assembly and reactor system are also disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.