Scanning electron microscope and method for analyzing secondary electron spin polarization
US11170972B2 · kind B2 · utility
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15Claims
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Key dates
| Filing date | Mar 27, 2018 |
| Grant date | Nov 9, 2021 |
| Priority date | — |
| Expiry date | Mar 27, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24585
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning electron microscope includes a spin detector configured to measure spin polarization of a secondary electron emitted from a sample, and an analysis device configured to analyze measurement data of the spin detector. The analysis device determines a width of a region where the secondary electron spin polarization locally changes in the measurement data. The analysis device further evaluates a strain in the sample based on the width of the region. With a configuration of the scanning electron microscope, it is possible to perform analysis of a strain in a magnetic material with high accuracy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.