Patent · US Active

Semiconductor device including a superlattice with different non-semiconductor material monolayers

US11177351B2 · kind B2 · utility

14Cited by
99References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 26, 2020
Grant dateNov 16, 2021
Priority date
Expiry dateFeb 26, 2040

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/235
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device may include a semiconductor substrate, and a superlattice on the semiconductor substrate and including a plurality of stacked groups of layers. Each group of layers of the superlattice may include a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions. A first at least one non-semiconductor monolayer may be constrained within the crystal lattice of a first pair of adjacent base semiconductor portions and comprise a first non-semiconductor material, and a second at least one non-semiconductor monolayer may be constrained within the crystal lattice of a second pair of adjacent base semiconductor portions and comprise a second non-semiconductor material different than the first non-semiconductor material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.