Method for conducting optical measurement usingfull Mueller matrix ellipsometer
US11187649B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 19, 2014 |
| Grant date | Nov 30, 2021 |
| Priority date | — |
| Expiry date | Feb 18, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/127
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for conducting optical measurement using a full Mueller matrix ellipsometer, which belongs to the technical field of optical measurements. The optical measurement method comprises: constructing an experimental optical path of a full Mueller matrix ellipsometer; conducting complete regression calibration on the full Mueller matrix ellipsometer; placing a sample to be measured on a sample platform, and obtaining an experimental Fourier coefficient of the sample to be measured; and according to the experimental Fourier coefficient of the sample to be measured, obtaining information about the sample to be measured. Since a calibration method for the full Mueller matrix ellipsometer is not only simple in operation process, but also makes full use of data of the full Mueller matrix ellipsometer measured at the same time, the introduced error is relatively small and the parameter obtained by calibration is more accurate, so that the measurement result is more accurate when the sample to be measured is measured. Thus, the process of the optical measurement method is simplified.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.