Patent · US Active

Spectral filter for high-power fiber illumination sources

US11187838B2 · kind B2 · utility

0Cited by

3References

34Claims

0Family size

Assignee

KLA Corporation · US

Inventors

Andrew V. Hill · Chino Hills, US
Ohad Bachar · Timrat, IL
Avi Abramov · Haifa, IL
Amnon Manassen · Haifa, IL

Key dates

Filing date	Aug 1, 2017
Grant date	Nov 30, 2021
Priority date	—
Expiry date	Aug 24, 2039

Classification

Technology area (CPC G)Physics
CPC primaryG01J2003/1213
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A spectral filter includes a curved filtering element including a concave surface forming a portion of a sphere. The concave surface may be positioned to receive light diverging from an output face of an optical fiber located at a first location proximate to a center of the sphere corresponding to the concave surface. The concave surface may transmit a first portion of a spectrum of the light. The concave surface may further reflect and focus a second portion of the spectrum to a second location proximate to the center of the sphere. The spectral filter may further include a collector to direct the second portion of the spectrum away from the output face of the optical fiber.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.