Microscopy method using temporal focus modulation, and microscope

US11194144B2 · kind B2 · utility

Assignee

• Carl Zeiss Microscopy GmbH · DE

Inventors

• Ralf Netz · Jena, DE
• Thomas Kalkbrenner · Jena, DE
• Tiemo Anhut · Jena, DE

Key dates

• Filing date: Jun 21, 2017
• Grant date: Dec 7, 2021
• Expiry date: Sep 11, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/008
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A microscopy method, and related microscope, including producing illumination radiation and directing it at a focus. The illumination radiation is switched temporally between at least two modes, such that focus modulation is effected at which temporally varying and mutually different mode fields of the illumination radiation are produced in the focus. The focus is guided at least over regions of a sample to be examined, wherein detection radiation in the sample is or may be brought about by the illumination radiation in the focus at least at a point of origin. The detection radiation is captured in a manner assigned to the at least one point of origin. In addition to the illumination radiation, at least one disexcitation beam of rays of disexcitation radiation is directed at the focus. The disexcitation radiation prevents the detection radiation from being brought about in the region that is illuminated by the disexcitation radiation.