Prober and probe card precooling method
US11199575B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 11, 2020 |
| Grant date | Dec 14, 2021 |
| Priority date | — |
| Expiry date | Aug 11, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2891
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A prober includes a plurality of inspection chambers, each of the plurality of inspection chambers including: a probe card having a plurality of probes; a probe card holder configured to hold the probe card; a chuck top configured to place a wafer on the chuck top; a seal mechanism configured to form a sealed space between the probe card holder and the chuck top; a temperature adjustor configured to adjust a temperature of the chuck top; and a gas supplier configured to supply a dry gas to the sealed space, and wherein, in a state in which no wafer is placed on the chuck top, the sealed space is purged with the dry gas, and precooling of the probe card is performed by cold heat of the chuck top having a temperature adjusted by the temperature adjustor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.