N—H free and Si-rich per-hydridopolysilzane compositions, their synthesis, and applications

US11203528B2 · kind B2 · utility

Assignees

• L'Air Liquide, Societe Anonyme Pour l'Etude et l'Exploitation des Procedes Georges Claude · FR
• American Air Liquide, Inc. · US

Inventors

• Antonio Sanchez · Tsukuba, JP
• Gennadiy Itov · Flemington, US
• Manish Khandelwal · Danbury, US
• Cole J. Ritter, III · Easton, US
• Peng Zhang · Montvale, US
• Jean-Marc Girard · Versailles, FR
• Zhiwen Wan · Plano, US
• Glenn Kuchenbeiser · Newark, US
• David Orban · Hampton, US
• Sean Kerrigan · Champaign, US
• Reno Pesaresi · Houston, US
• Matthew Damien Stephens · Kingsport, US
• Yang Wang · Shanghai, CN
• Guillaume Husson · Newark, US

Key dates

• Filing date: Mar 11, 2020
• Grant date: Dec 21, 2021
• Expiry date: Mar 11, 2040

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/02222
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Solid or liquid N—H free, C-free, and Si-rich perhydropolysilazane compositions comprising units having the following formula [—N(SiH3)x(SiH2—)y], wherein x=0, 1, or 2 and y=0, 1, or 2 when x+y=2; and x=0, 1 or 2 and y=1, 2, or 3 when x+y=3 are disclosed. Also disclosed are synthesis methods and applications for the same.