Multi-object capable loadlock system

US11211269B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Andrew Paul Harbert · Austin, US
• Michael C Kuchar · Georgetown, US
• Nicholas Michael Bergantz · Sunnyvale, US
• Leon Volfovski · Mountain View, US
• Sivakumar Ramalingam · Bengaluru, IN
• Karuppasamy Muthukamatchi · Madurai, IN
• Douglas R. McAllister · Pleasanton, US

Key dates

• Filing date: Jul 8, 2020
• Grant date: Dec 28, 2021
• Expiry date: Jul 8, 2040

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/68707
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A method includes receiving, by a first loadlock chamber of the loadlock system, a first object from a factory interface via a first opening. The first object is transferred into the first loadlock chamber via a first robot arm. The factory interface is at a first state. The first loadlock chamber is configured to receive different types of objects. The method further includes sealing a first loadlock door against the first opening to create a first sealed environment at the first state in the first loadlock chamber and causing the first sealed environment of the first loadlock chamber to be changed to a second state. The method further includes actuating a second loadlock door to provide a second opening between the first loadlock chamber and a transfer chamber. The first object is to be transferred from the first loadlock chamber to the transfer chamber via a second robot arm.