Leon Volfovski
32Patents
10h-index
55Co-inventors
78Inventor score
Filing activity: Feb 6, 1997 → Mar 28, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5871390A | Method and apparatus for aligning and tensioning a pad/belt used in linear planarization for chemical mechanical polishing | Performing Operations; Transporting | 59 | Expired |
| US7357842B2 | Cluster tool architecture for processing a substrate | Emerging Cross-Sectional Technologies | 55 | Expired |
| US7925377B2 | Cluster tool architecture for processing a substrate | Emerging Cross-Sectional Technologies | 32 | Active |
| US6454332B1 | Apparatus and methods for handling a substrate | Emerging Cross-Sectional Technologies | 31 | Expired |
| US7694647B2 | Cluster tool architecture for processing a substrate | Emerging Cross-Sectional Technologies | 28 | Active |
| US7743728B2 | Cluster tool architecture for processing a substrate | Emerging Cross-Sectional Technologies | 27 | Active |
| US7699021B2 | Cluster tool substrate throughput optimization | Emerging Cross-Sectional Technologies | 26 | Active |
| US8146530B2 | Cluster tool architecture for processing a substrate | Emerging Cross-Sectional Technologies | 13 | Active |
| US8215262B2 | Cluster tool architecture for processing a substrate | Emerging Cross-Sectional Technologies | 10 | Active |
| US8181596B2 | Cluster tool architecture for processing a substrate | Emerging Cross-Sectional Technologies | 10 | Active |
| US10242890B2 | Substrate support with heater | Electricity | 9 | Active |
| US7779527B2 | Methods and apparatus for installing a scrubber brush on a mandrel | Emerging Cross-Sectional Technologies | 8 | Active |
| US8550031B2 | Cluster tool architecture for processing a substrate | Emerging Cross-Sectional Technologies | 6 | Active |
| US9698074B2 | Heated substrate support with temperature profile control | Emerging Cross-Sectional Technologies | 6 | Active |
| US10964584B2 | Process kit ring adaptor | Electricity | 4 | Active |
| US9538583B2 | Substrate support with switchable multizone heater | Electricity | 4 | Active |
| US7900311B2 | Wafer edge cleaning | Emerging Cross-Sectional Technologies | 3 | Active |
| US11211269B2 | Multi-object capable loadlock system | Electricity | 2 | Active |
| US9698041B2 | Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methods | Electricity | 2 | Active |
| US9706605B2 | Substrate support with feedthrough structure | Electricity | 1 | Active |
| US11626305B2 | Sensor-based correction of robot-held object | Physics | 1 | Active |
| US10217650B2 | Methods and apparatus for substrate edge cleaning | Electricity | 0 | Active |
| US8099817B2 | Wafer edge cleaning | Emerging Cross-Sectional Technologies | 0 | Active |
| US11823937B2 | Calibration of an aligner station of a processing system | Electricity | 0 | Active |
| US11600580B2 | Replaceable end effector contact pads, end effectors, and maintenance methods | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.