Light intensity fluctuation-insensitive projection objective wave aberration detection device and detection method thereof

US11215512B2 · kind B2 · utility

Assignee

• Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences · CN

Inventors

• Feng Tang · Geneva, US
• Xiangzhao Wang · Shanghai, CN
• Yunjun Lu · Shanghai, CN
• Changzhe Peng · Shanghai, CN
• Yang Liu · Beijing, CN

Key dates

• Filing date: Sep 25, 2020
• Grant date: Jan 4, 2022
• Expiry date: Sep 25, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/706
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A light intensity fluctuation-insensitive projection objective wave aberration detection device and a detection method thereof, comprising a light source and illumination system, an object plane marking plate, an object plane displacement table, a tested projection objective, an image plane marking plate, a two-dimensional photosensor, an image plane displacement table and a control processing unit; the object plane marking plate and the image plane marking plate are provided with grating marks for shear interference test and marks for light intensity test, the shear interferograms and the light intensity information are simultaneously received through the two-dimensional photosensor, the light intensity fluctuation error corresponding to each phase-shifting interferogram is corrected through the light intensity information, improving the detection precision, reducing the complexity and the cost of the system, and improving the detection speed.