Xiangzhao Wang
13Patents
2h-index
17Co-inventors
47Inventor score
Filing activity: Dec 25, 2006 → Apr 25, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11029611B2 | Device and method for detecting projection objective wave-front aberration | Physics | 2 | Active |
| US11009336B2 | Method for wavefront measurement of optical imaging system based on grating shearing interferometry | Physics | 2 | Active |
| US9766154B2 | Multi field point aberration parallel metrology device and method for lithographic projection lens | Physics | 2 | Active |
| US9658114B1 | Device for measuring point diffraction interferometric wavefront aberration and method for detecting wave aberration | Physics | 1 | Active |
| US10969274B2 | Method for detecting wavefront aberration for optical imaging system based on grating shearing interferometer | Physics | 1 | Active |
| US11215512B2 | Light intensity fluctuation-insensitive projection objective wave aberration detection device and detection method thereof | Physics | 1 | Active |
| US11604418B2 | Multi-channel device and method for measuring distortion and magnification of objective lens | Physics | 0 | Active |
| US8035801B2 | Method for in-situ aberration measurement of optical imaging system in lithographic tools | Physics | 0 | Active |
| US11561082B2 | Method for compensation during the process of wavefront reconstruction in grating-based lateral shearing interferometry | Physics | 0 | Active |
| US11668625B2 | Apparatus and method for detecting wavefront aberration of objective lens | Physics | 0 | Active |
| US11788829B2 | Simultaneous phase-shift point diffraction interferometer and method for detecting wave aberration | Physics | 0 | Active |
| US11340118B2 | Method for high-accuracy wavefront measurement base on grating shearing interferometry | Physics | 0 | Active |
| US9863841B2 | Measuring device having ideal wavefront generator for detecting point diffraction interferometric wavefront aberration of measured optical system and method for detecting wavefront aberration thereof | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.