Method and apparatus for capturing volume information of three-dimensional samples

US11215536B2 · kind B2 · utility

Assignee

• Carl Zeiss Microscopy GmbH · DE

Inventors

• Marlene Thaler · Aalen, DE
• Robert Kirmse · Gablitz, AT
• Josef Biberger · Rottenburg a. d. Laaber, DE
• Judith Kimling · Aalen, DE
• Lars Ehrhardt · Oberkochen, DE

Key dates

• Filing date: Jul 7, 2020
• Grant date: Jan 4, 2022
• Expiry date: Jul 7, 2040

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/31749
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Methods and apparatuses for capturing volume information of microscopic samples include a microscope system having at least one particle beam column, by which a beam of focused, charged particles can be generated, and an in-situ microtome, i.e., a microtome integrated in the microscope system. The method cam include a) providing a sample including a volume of interest (VOI); b) setting a cut surface lying within the sample; c) defining the set cut surface as processing surface; d) exposing the cut surface by virtue of ablating sample material by cutting with the in-situ microtome; and e) processing the sample with the particle beam, wherein the start point of the processing is disposed on the exposed processing surface.