Multi-environment polarized infrared reflectometer for semiconductor metrology
US11231362B1 · kind B1 · utility
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20Claims
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Key dates
| Filing date | Dec 20, 2019 |
| Grant date | Jan 25, 2022 |
| Priority date | — |
| Expiry date | Apr 1, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/3595
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system includes a light source, a Fourier transform infrared reflectometer (FTIR) spectrometer, and broadband reflectometer optics. The system is configured to measure polarized light and unpolarized reflectivities in a wavelength range from 2 μm to 20 μm. The light source can be a laser-driven light source. The spectroscopic reflectometer can include a single channel or two channels.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.