Pellicle and pellicle assembly
US11231646B2 · kind B2 · utility
0Cited by
2References
20Claims
0Family size
Assignee
Inventors
- David Ferdinand Vles
- Chaitanya Krishna ANDE
- Antonius Franciscus Johannes De Groot
- Adrianus Johannes Maria Giesbers
- Johannes Joseph Janssen
- Paul Janssen
- Johan Hendrik Klootwijk
- Peter Simon Antonius Knapen
- Evgenia KURGANOVA
- Marcel Peter Meijer
- Wouter Rogier Meijerink
- Maxim Aleksandrovich Nasalevich
- Arnoud Willem Notenboom
- Raymond Olsman
- Hrishikesh Patel
- Mária Péter
- Gerrit Van Den Bosch
- Wilhelmus Theodorus Anthonius Johannes Van Den Einden
- Willem Joan Van Der Zande
- Pieter-Jan Van Zwol
- Johannes Petrus Martinus Bernardus Vermeulen
- Willem-Pieter Voorthuijzen
- Hendrikus Jan Wondergem
- Aleksandar Nikolov Zdravkov
Key dates
| Filing date | Jun 8, 2018 |
| Grant date | Jan 25, 2022 |
| Priority date | — |
| Expiry date | Nov 3, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/64
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A pellicle assembly is disclosed that has a pellicle frame defining a surface onto which a pellicle is to be attached. The pellicle assembly includes one or more three-dimensional expansion structures that allow the pellicle to expand under stress. There is also disclosed a pellicle assembly for a patterning device, the pellicle assembly including one or more actuators for moving the pellicle assembly towards and way from the patterning device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.