Patent · US Active

Transport system

US11232965B2 · kind B2 · utility

3Cited by

11References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Jacob Newman · Palo Alto, US
Ulrich Oldendorf · Ober-Ramstadt, DE
Martin Aenis · Darmstadt, DE
Andrew J. Constant · Cupertino, US
Shay Assaf · Santa Clara, US
Jeffrey C. Hudgens · San Francisco, US
Alexander Berger · Palo Alto, US
William T. Weaver · Austin, US

Key dates

Filing date	Oct 2, 2019
Grant date	Jan 25, 2022
Priority date	—
Expiry date	Apr 10, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/68707
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.