Shay Assaf
12Patents
3h-index
36Co-inventors
56Inventor score
Filing activity: Oct 2, 2008 → Feb 9, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8527080B2 | Method and system for managing process jobs in a semiconductor fabrication facility | Physics | 6 | Active |
| US11581203B2 | Systems for integrating load locks into a factory interface footprint space | Electricity | 3 | Active |
| US11232965B2 | Transport system | Electricity | 3 | Active |
| US9959610B2 | System and method to detect substrate and/or substrate support misalignment using imaging | Physics | 2 | Active |
| US11894251B2 | Transport system | Electricity | 0 | Active |
| US10818525B2 | Ambient controlled transfer module and process system | Electricity | 0 | Active |
| US12142508B2 | Factory interface robots usable with integrated load locks | Electricity | 0 | Active |
| US12159796B2 | Systems and methods for integrating load locks into a factory interface footprint space | Electricity | 0 | Active |
| US10665494B2 | Automated apparatus to temporarily attach substrates to carriers without adhesives for processing | Electricity | 0 | Active |
| US11204312B2 | In-situ full wafer metrology system | Physics | 0 | Active |
| US10361104B2 | Ambient controlled transfer module and process system | Electricity | 0 | Active |
| US11817332B2 | Multi-wafer volume single transfer chamber facet | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.