Patent · US Active

Objective lens arrangement

US11264198B2 · kind B2 · utility

0Cited by

1References

19Claims

0Family size

Assignee

Applied Materials Israel Ltd. · IL

Inventors

Igor Petrov · Holon, IL
Zvika Rosenberg · Mevaseret Tsiyon, IL
Arie Bader · Nes Ziona, IL

Key dates

Filing date	Oct 15, 2018
Grant date	Mar 1, 2022
Priority date	—
Expiry date	Mar 8, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/28
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An objective lens arrangement that may include a magnetic lens and an electrostatic lens. The magnetic lens may include one or more coils, an upper polepiece and a lower polepiece. The electrostatic lens may include an upper electrode, an internal lower electrode and an external lower electrode. A majority of the internal lower electrode may be surrounded by a majority of the external lower electrode. The upper electrode, the internal lower electrode, and the external lower electrode are arranged in a coaxial relationship along an optical axis of the objective lens arrangement. An area of a bottom aperture of the external lower electrode may not exceed an area of a bottom aperture of the internal lower electrode.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.