Calibration method, system and device of on-wafer s parameter of vector network analyzer

US11275103B2 · kind B2 · utility

Assignee

• THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION · CN

Inventors

• Yibang Wang · Shijiazhuang, CN
• Aihua Wu · Xinzhai, CN
• Faguo Liang · Shijiazhuang, CN
• Chen Liu · Weihai, CN
• Xuefeng Zou · Guiyang, CN
• Zhifu Hu · Shijiazhuang, CN
• Jian Cao · Shanghai, CN
• Ye Huo · Shijiazhuang, CN

Key dates

• Filing date: Sep 19, 2020
• Grant date: Mar 15, 2022
• Expiry date: Sep 19, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R35/005
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The disclosure provides a calibration method, a system and a device of an on-wafer S parameter of a vector network analyzer. The method comprises the steps of: acquiring a first parameter of a first crosstalk calibration piece measured by the vector network analyzer; obtaining a main crosstalk error term based on the first parameter of the first crosstalk calibration piece and a calibration parameter of the first crosstalk calibration piece; acquiring a second parameter of a second crosstalk calibration piece measured by the vector network analyzer based on the main crosstalk error term; and obtaining a secondary crosstalk error term based on the second parameter of the second crosstalk calibration piece and a calibration parameter of the second crosstalk calibration piece, wherein the main crosstalk error term and the secondary crosstalk error term are used for calibrating the vector network analyzer.