Systems and methods for automated video analysis detection techniques for substrate process
US11276157B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 29, 2020 |
| Grant date | Mar 15, 2022 |
| Priority date | — |
| Expiry date | Sep 29, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30164
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Camera images are utilized to provide information regarding characteristics of in a fluid dispense system. Camera images may be utilized to identify the movement of the hardware of a fluid dispense system. The movement of the hardware may be utilized to determine the beginning of a fluid dispense based upon a correlation between the hardware movement and a dispense time provided in a dispense recipe. The beginning of the fluid dispense may be detected by performing an image analysis on the camera images to detect the presence of the fluid in the camera image. The image analysis may involve an intensity analysis of the detected camera image. In another embodiment, the camera image is utilized to detect the edges of the fluid formed on substrate. The edges may be detected as a puddle formed prior to spinning the substrate and/or may be detected as the puddle spreads during spinning.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.