Sensors for detecting substitution between chemicals and methods of manufacturing a semiconductor device using the sensor
US11280753B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Feb 4, 2020 |
| Grant date | Mar 22, 2022 |
| Priority date | — |
| Expiry date | Sep 11, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Sensors for detecting a substitution between chemicals may include an upper electrode and an electrical signal measurement circuit. A first chemical and a second chemical may be sequentially applied to the upper electrode. A triboelectrification may be generated between the upper electrode and the first and second chemicals to flow different electrical signals through the upper electrode. The electrical signal measurement circuit may measure the electrical signals to detect the substitution between the first and second chemicals. Thus, the second chemical may be applied to a semiconductor substrate from the substitution timing so that an original function of the second chemical may be maintained without a delay of the time for fabricating a semiconductor device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.