Voltage application device for testing plurality of devices and method of forming output voltage waveform
US11293978B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 25, 2018 |
| Grant date | Apr 5, 2022 |
| Priority date | — |
| Expiry date | Dec 13, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/3004
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A voltage application device of a tester includes a voltage setting controller that sets a number of transient steps, step time, and step voltage as transient voltage setting parameters; and a device power supply (DPS) configured to supply power to the plurality of devices under test formed on a substrate. The voltage application device outputs an output voltage having a step-like transient voltage waveform based on the transient voltage setting parameters set by the voltage setting controller. The voltage application device is a high-order lag system of a second-order or higher in which an overshoot occurs in a response with respect to a set voltage. An end point of a step time of each of the transient steps set in the voltage setting controller is set to be a time between an end point of a rising time and an overshoot time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.