Patent · US Active

Determining locations of suspected defects

US11301987B2 · kind B2 · utility

0Cited by

0References

13Claims

0Family size

Assignee

Applied Materials Israel Ltd. · IL

Inventors

Ofir Greenberg · Haniel, IL
Dan Segal · Raanana, IL
Dae Hwan Youn · Rehovot, IL
Tal Ben-Shlomo · Givatayim, IL

Key dates

Filing date	Mar 3, 2020
Grant date	Apr 12, 2022
Priority date	—
Expiry date	Oct 23, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG06T2207/30148
WIPO fieldComputer technology
WIPO sectorElectrical engineering

Abstract

A method, a non-transitory computer readable medium and a detection system for determining locations of suspected defects of a substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.